Boron Trichloride BCL3
CAS No.: 10294-35-1
EINECS No.: 233-658-4
UN No.: UN1741
Dot Class: 2.3
Appearance: Colorless, corrosive, liquefied gas
Grade Standard: Industrial Grade, Electronic Grade
BCL3 could be used to make high pure boron, organic synthesis catalyst; as flux of decomposition of silicate; used for iron boronizing.
It has been used in the field of high energy fuels and rocket propellants as a source of boron to raise BTU value.
BCl3 is also used in plasma etching in semiconductor manufacturing. This gas etches metal oxides by formation of a volatile BOClx compounds.