Carbon Tetrafluoride CF4
CAS No.: 75-73-0
EINECS No.: 200-896-5
UN No.: UN1982
Dot Class: 2.2
Grade Standard: Industrial Grade, Refrigerant Grade
Tetrafluoromethane is sometimes used as a low temperature refrigerant.
It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.